AD GreenMode - Subfab energy savings solution.

AD GreenMode

Our system optimizes your subfab’s energy efficiency and reduces the CO2 footprint of your production.

In semiconductor manufacturing, the majority of energy is used to power the processes and devices in the subfab. That is why Automatisierung Dresden has developed a system which enables smart energy savings and can therefore lower CO2 emissions.

Reduce costs by lowering energy consumption
Full utilization of saving potentials
Sustainable manufacturing with the help of reduced emissions
Main features

Characteristics of our system:


We are a supplier-independent partner for your individual GreenMode solution.

  • Independence from equipment manufacturers
  • No manufacturer-specific software lock-in

Open Source

We provide a 'service', not a proprietary product.

  • Reduced time to benefit
  • Scalability and integration


Particular attention has been paid to allow implementation of AD GreenMode in existing fabs.

Low risk

AD GreenMode is designed to avoid any additional risk to process integrity and yield.

Device interfaces

Our extensive interface libraries cover most abatements and vacuum pumps. They are based on over 30 years of experience in working with different subfabs.

IT integration

The system can be integrated into already existing IT infrastructures and serves as a part of a highly interconnected fab.


AD GreenMode was developed with a focus on being implemented in existing as well as greenfield fabs.

Our system can easily be integrated into fab infrastructures. We use existing subfab device features to realize energy savings.

Vacuum pumps: Use of devices for the reduction of N2 purge and pump speed
Abatements: dynamic change between different flame modes

Make full use of your fab’s energy saving potentials.

For a long time and in many fabs, tool level and subfab did not exchange a lot of information. This applies to signals, interfaces as well as other types of information. This barrier seems to disappear gradually in new fabs. The level of data integration and exchange leads to new manufacturing philosophies. Our system serves as an element in an IT driven fab.

Information about tool usage from the MES via REST API
Real time information about ongoing processes in each process chamber via Interface A
Surveillance of all process steps and initialization of energy saving measure based on the data
Integration of all binary and interlock signals as well as signals used for energy savings
Standard PLC for process control
Ansible server for provisioning, configuration management and application-deployment
Return to nominal levels in case of failure
System adaptation to specific interlock signals of specific tools
Central administration and control